This was the first field emission SEM installed in the OSU EMF. It was capable of conducting chemical composition analysis via an X-Ray EDS system. It was funded by National Science Foundation ($138,350) and matched by the OSU Research Office ($100,000). Its resolution was 1.5 nm at 30kV and 5.0 nm at 1 kV accelerating voltages. It was in service for 12 years. In 2008, it was replaced by the FEI Quanta 3D Dual Beam SEM (FIB) and Quant 600F. Both are field emission SEMs.