TitleSolution based prompt inorganic condensation and atomic layer deposition of Al203 films: A side-by-side comparison
Publication TypeJournal Article
Year of Publication2014
AuthorsSmith SW, Wang W, Keszler DA, Conley, Jr JF
JournalJournal of Vacuum Science & Technology
VolumeA 32
Issue4
URLhttp://hdl.handle.net/1957/51279