Nova SEM at OSU

The Nova SEM field emission scope has an imersion lens or through the lens detector for high resoution imaging.   Like our other tools it also has an X-ray detector for EDS semi quant work.  The tool is especially suited for nano-materials applications.



This is a high resolution tool with a through the lens detector.  It really comes into play above 100,000x magnification.  Field emission electron source, with probe current to 10 nA (high resolution mode), 22 nA (analytical mode)
Beam acceleration voltages selectable from 200 volts to 30 kilovolts
Beam deceleration option minimizes beam damage to sensitive specimens, beam impact energy as low as 50 volts
Six electron image signal detectors:

  • In-lens secondary electron detector [a.k.a. "immersion" or "through-the-lens" (TLD) secondary electron (SE) detector, TLD-SE]
  • In-lens BSE detector (through-the-lens detector, backscatterd electron, TLD-BSE)
  • Everhart-Thornley detector (ETD) [conventional "below-the-lens" detector]
  • Solid state scanning transmitted electron (STEM) detector
  • Gaseous analytical detector (GAD) low kV backscattered electron detector is availabe but not in use yet.
  • Low vacuum secondary electron detector (LVD) for use with non-conductive samples

Resolution at optimum working distance:

  • 1.0 nm at 15 kV (TLD-SE)
  • 1.6 nm at 1 kV (TLD-SE)
  • 0.8 nm at 30 kV (STEM)

Motorized 4 axis stage assures precise, reproducible specimen positioning

X-Ray Energy Dispersive Spectrometer (EDS) for elemental spectra, mapping.