This was the first field emission SEM installed in the facility of Oregon State University. It was funded by National Science Foundation ($138,350) and matched by OSU Research Office ($100,000). At 30kV, the resolution was 1.5nm, at 1kV, it was 5.0nm. It was equipped with EDS system. It was in service fror 12 years. In 2008, it was replaced by FEI Quanta 3D Dual Beam SEM (FIB) and Quant 600F. Both are field emission SEMs.