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Ion mill

Ion mill

Image

A TEM facility is probably not complete with a broad beam ion mill. We will soon have access to a new broad beam ion mill in Mellissa Santala's lab. The broad beam ion mill still makes the largest samples, compared with a FIB (exception the new plasma FIB). And it does so with less damage, although the gap between FIB damage and broad beam ion mill has closed wth our new Helios 650 and its capability to perform 500 eV polish. In the semiconductor industry broad beam ion mills are almost never used as they are not site specific like a FIB. (Image: Gatan 600 Duomill ion mill).